JPS635211Y2 - - Google Patents
Info
- Publication number
- JPS635211Y2 JPS635211Y2 JP18546583U JP18546583U JPS635211Y2 JP S635211 Y2 JPS635211 Y2 JP S635211Y2 JP 18546583 U JP18546583 U JP 18546583U JP 18546583 U JP18546583 U JP 18546583U JP S635211 Y2 JPS635211 Y2 JP S635211Y2
- Authority
- JP
- Japan
- Prior art keywords
- loader
- wafer
- cleaning
- loaders
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 28
- 238000012360 testing method Methods 0.000 claims description 12
- 230000032258 transport Effects 0.000 claims description 9
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000007723 transport mechanism Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 39
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18546583U JPS6092836U (ja) | 1983-11-30 | 1983-11-30 | クリーニングウェハの保持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18546583U JPS6092836U (ja) | 1983-11-30 | 1983-11-30 | クリーニングウェハの保持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6092836U JPS6092836U (ja) | 1985-06-25 |
| JPS635211Y2 true JPS635211Y2 (en]) | 1988-02-12 |
Family
ID=30400854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18546583U Granted JPS6092836U (ja) | 1983-11-30 | 1983-11-30 | クリーニングウェハの保持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6092836U (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0622258B2 (ja) * | 1987-07-24 | 1994-03-23 | 日立電子エンジニアリング株式会社 | ウエハ表面検査装置 |
| JPS6447041A (en) * | 1987-08-18 | 1989-02-21 | Hitachi Electr Eng | Wafer surface inspecting equipment |
| JP2627787B2 (ja) * | 1988-08-24 | 1997-07-09 | 株式会社東京精密 | プロービング機のクリーニングウェハ収容装置 |
-
1983
- 1983-11-30 JP JP18546583U patent/JPS6092836U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6092836U (ja) | 1985-06-25 |
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